JPS6266104A - 光学的距離検出器 - Google Patents

光学的距離検出器

Info

Publication number
JPS6266104A
JPS6266104A JP20765685A JP20765685A JPS6266104A JP S6266104 A JPS6266104 A JP S6266104A JP 20765685 A JP20765685 A JP 20765685A JP 20765685 A JP20765685 A JP 20765685A JP S6266104 A JPS6266104 A JP S6266104A
Authority
JP
Japan
Prior art keywords
observation
observation lens
distance
distance detector
optical axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20765685A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0465962B2 (en]
Inventor
Masanori Idesawa
正徳 出澤
Genichiro Kinoshita
木下 源一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN filed Critical RIKEN
Priority to JP20765685A priority Critical patent/JPS6266104A/ja
Publication of JPS6266104A publication Critical patent/JPS6266104A/ja
Publication of JPH0465962B2 publication Critical patent/JPH0465962B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP20765685A 1985-09-19 1985-09-19 光学的距離検出器 Granted JPS6266104A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20765685A JPS6266104A (ja) 1985-09-19 1985-09-19 光学的距離検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20765685A JPS6266104A (ja) 1985-09-19 1985-09-19 光学的距離検出器

Publications (2)

Publication Number Publication Date
JPS6266104A true JPS6266104A (ja) 1987-03-25
JPH0465962B2 JPH0465962B2 (en]) 1992-10-21

Family

ID=16543385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20765685A Granted JPS6266104A (ja) 1985-09-19 1985-09-19 光学的距離検出器

Country Status (1)

Country Link
JP (1) JPS6266104A (en])

Also Published As

Publication number Publication date
JPH0465962B2 (en]) 1992-10-21

Similar Documents

Publication Publication Date Title
US5059022A (en) Device for measuring radius of curvature and a method thereof
JPS6266104A (ja) 光学的距離検出器
JPS5927843B2 (ja) 光学的角度検出方法
JPS6266111A (ja) 光学的距離検出装置
JPH0575050B2 (en])
JPS63180810A (ja) 高さ検出方式
JPH08261734A (ja) 形状測定装置
JPS63298113A (ja) 光学的距離検出装置の結像光学系の構成
JPS6287809A (ja) 多方向距離測定装置
JPS63263411A (ja) 光学的距離検出装置
JP2584630B2 (ja) 側面形状計測用光触針の構成
JPS5825295Y2 (ja) 検出機構
JPH0255734B2 (en])
JPS63292015A (ja) 光学的距離検出装置撮像光学系の構成
JPH049525Y2 (en])
JPS6134117U (ja) 距離検出装置における投光光学系
JP2502446Y2 (ja) 干渉縞発生器
JPH1019513A (ja) 位置計測装置及びパターン測定装置
JPH07110234A (ja) 距離検出方法
JPH03252513A (ja) パラボラアンテナ面形状測定装置
JPS5880537A (ja) ポリゴンミラ−検査装置
JPH0789043B2 (ja) シエアリング干渉計
JPS61234303A (ja) レ−ザ干渉測長系の測長光軸アライメント法
JPS61181909A (ja) 距離検知装置
JPH03165230A (ja) レンズの傾き測定装置